Automated for Repeatable, Faster Testing
After initial alignment, the Automated Wafer Prober will activate each test site on a wafer automatically, accurately, and quickly. Setup parameters are stored for ongoing and future testing and analysis. A new alignment microscope adds ease and accuracy to the initial setup and fine alignment.
Programmable Wafer Stage and Pin Stage
Using AIRIS Wafer Stage and Wafer Navigation software, users can program the wafer stage XY axes and the prober Z axis. After initial setup, the wafer prober will operate automatically to test the full wafer in a fraction of the time of manual probing.