IREM WaferProber

  Infrared Laboratories introduced and patented (Patent No. US 6,515,494 B1) a unique set of solutions to critical problems associated with backside emission microscopy at the wafer level.  Only by using the IR-emission camera itself to align and operate the prober mechanism can the user image the probe tips directly and locate them precisely relative to relevant features on the wafer.  In addition, the design enables precise correction of tip/tilt errors between the probe tips and the wafer.

Customized 3-axis and 5-axis IREM WaferProbers are available for 200-mm and 300-mm wafer probing.  If topside viewing is desired for classic probe cards then that option is easily provided.  In most cases the user can quickly and easily reconfigure their prober for packaged parts, as needed.  IRLabs is now shipping C4 WaferProbers with full support.