IREM Positioning System

A high quality, high performance 3-Axis IREM Positioning System designed by Motion X Corporation(MX) specifically for emission microscopy failure analysis. Motion X's unique concept is to begin with the most advanced motion sub-system available.  Building from that solid foundation, best-in-class components are added to create a high performance, highly reliable positioning system. The system utilizes an open frame design to insure the highest “in position” stability and lowest possible long-term drift. Unlike traditionally stacked stage systems, the use of the open frame architecture allows for mounting of the IREM camera symmetrically to all three axis of motion. In doing so the overall height of the stage is kept to a minimum and the effect of a counter-lever associated with traditional stacked stage configurations is completely eliminated.

X-Y Stage

The MX-Precision Open Frame stage is specifically designed for production test measurement and inspection applications requiring transmitted illumination or center mounting of an imaging/sensing transducer. Unlike other X-Y designs that are assembled from several discrete components, the MX-Precision Open Frame stage is a three-piece design which enables critical features such as straightness, flatness and orthagonality to be controlled during the machining process, resulting in a stage with exceptional geometrical tolerances. To increase overall performance and accuracy, all critical stage components are machined twice and precision ground under stringent temperature requirements and quality control procedures.

The MX-Precision Open Frame stage employs 6mm cross roller bearings to achieve exceptional stiffness, high load capacity and extremely low friction. The X-Y axis use high-powered linear motors to meet the needs of the most demanding applications. The linear motors provide for a direct drive system with zero backlash, no windup, exceptional acceleration, zero friction and outstanding servo stiffness.  The MX-Precision Open Frame Stage incorporates 50nM resolution high accuracy non-contact glass scale encoders. These encoders offer exceptional stability and repeatability over a wide range of operating conditions and include a center reference mark as well as internal limit sensors.

Z Stage

The MX-Z Axis stage is a uniquely designed Z-Axis stage that incorporates a pneumatic counter weight system for use with lead screw driven motor applications. The active pneumatic counter weight system compensates for added friction on the lead screw and balances the load for smooth bi-directional servo operation. The MX-Z stage employs 6mm cross roller bearings to achieve exceptional stiffness, high load capacity and extremely low friction. Both the motor and the lead screw are mounted on the side of travel to allow for easy access for normal maintenance as well as the periodic lubrication of the drive screw. The MX-Z Stage incorporates 100nM resolution high accuracy non-contact glass scale encoders. These encoders offer exceptional stability and repeatability over a wide range of operating conditions and include a center reference mark as well as internal limit sensors.

Motion Controller

The MX-Motion Controller uses a Delta Tau “state of the art” 32-bit DSP which is enclosed in a 19 inch rack mount chassis. This chassis houses all required power supplies, interconnects, circuit protection, thermal management and drive electronics. The use of MX's proprietary linear servo amplifiers eliminates base line noise associated with digital and PWM drives commonly used in these applications. These MX linear drives were designed specifically for low noise emission microscopy applications.

Partial list of the Motion Controller's Special Features:

  1. Motorola DSP 56k Digital Signal Processor.
  2. Advanced PID servo loop.
  3. Flash on-board memory.
  4. Highly accurate and simultaneous motion control of 3 axis
  5. 16-bit DAC Output Resolution. 
  6. Analog ±10 Volts amplifier outputs.
  7. Standard RS-232 communications, USB and Ethernet.
  8. Stand-Alone Operation.
  9. 36-bit position range (+/- 64 billion counts).
  10. 2 Output DAC’s per axis for motor commutation.
  11. Dedicated per axis over travel limit flags.
  12. CE and UL Certified.
  13. Three axis digital joystick.

Stage Enclosure

The stage enclosure is designed for light tight operation and employs a number of light reduction techniques. The enclosure consists of a ridged steel frame constructed with 2 inch steel tubing and a steel base plate. Added to this frame are light-baffled removable side panels allowing for maintenance and access to the stage, camera and camera electronics. The stage enclosure also utilizes large swivel castor wheels and adjustable leveling pads for ease of moving and positioning the tool inside the lab. Inside the enclosure is a precision ground granite base plates to which the 3 axis positioning stage, top plate and top plate supports are mounted. The granite base and associated components are supported by a custom active air isolation control system.

Emergency Power Off System

The MX-EPO system provides system control of electrical input power used by the motion controller and camera electronics. It includes one 19” rack mount front panel, 19” rack mount controller and a remote switch box.

Partial list of the MX-EPO's Special Features:

  1. 19” Rack Mounted
  2. 10 Nema VAC Outlets
  3. Indicator Lights
  4. EMI/RFI Filtering
  5. Overload Circuit Protection
  6. Remote Switching
  7. CE and UL Certified

Accessories

A 19” Equipment Rack with a 48” height and with a cooling fan, plexi-glass latching front door, louvered latching rear door and swivel castor wheels. This Equipment Rack houses the motion controller, system computer and EPO system controller and front panel.

Adjustable Height 48” Work Station (desk) with right side box drawer and articulating keyboard and mouse tray.