IREM Systems for Semiconductor FA/Debug
+1 (520) 622-7074  |  sales@irlabs.com

Motion & Electronics Subsystems

Image 90nm device. 25x Lens 4x4 Mosaic / SIL Overlay Image / SIL detail 257nm line spacing
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IREM Systems

IREM-SIL  
IREM-II

IREM-SIL Subsystems  
Optics
Motion & Electronics
AIRIS Software

Upgrades  
IREM-I to SIL
IREM-II to SIL
Lens Slide, Motion System & Electronics Control Subsystems

IR:Labs high-speed, high-resolution, closed loop lens slide   Lens Slide
Four times faster and an order of magnitude better resolution. Get fast, repeatable performance without loss of region of interest (ROI) by upgrading your 2- or 3-position lens slide to a new high-speed, high-resolution, closed loop lens slide:
  • Now 100nm resolution.
  • "Pan from static" -- fast and accurate panning from static guide image.
  • Kinematically mounted sectors preserve offset value (parcentricity) accuracy for fast lens swaps and sector swaps.
  • Return to same ROI following lens swap for most consistent imaging and best reporting.
  • High-speed lens slide travel.
  • Ready for future SIL lens sector upgrade.
IRLabs Motion Control System
  Motion Control System
Stage and Ultra-Precise Motion Control
This system
uses an open-frame architecture and drives the moving mass at the center of gravity, minimizing residual vibration for rapid “in-position” settling. High resolution encoders allow for extremely small, controlled camera motions. In addition, the system features pneumatic vibration isolation with a low, well-damped resonant frequency, ensuring that vibrations are not transmitted to the DUT or camera. 
  • 8-axis for the highest in-position stability and lowest possible long-term drift.
  • Ultra-low parcentricity error for precise localization.
IRLabs Stage
  X-Y-Z stage is specifically designed for production test measurement and inspection applications requiring transmitted illumination or center mounting of an imaging/sensing transducer.
         
     IRLabs Auxiliary Electronics   Auxiliary Electronics
    Save time and improve quality for day-to-day repeatability with this power supply and motion controller for the Lens Slide:
    • High-speed, high-repeatability motion control for improved parcentricity.
    • Constant current sources for the illuminators to maintain image consistency for day-to-day repeatability and temporally stable illumination.
    • Full software control for selection of illuminators.