IREM-SIL Systems
The world’s most sensitive, highest lateral resolution InGaAs-based IREM

The IREM-SIL, built on the core technology of its predecessor, the IREM-II, enables unprecedented resolution and imaging for deep sub-micron levels required today and in the future.

		Resolution. Detector/Camera Proprietary ULN Image Sensor Lowest noise, highest SNR	Lenses 1.1µm - 1.6µm operations 0.3x macro lens, 1x, 10x, 25x, 100x, LIO, 2.8 NA SIL, and more Highest transmission and resolution SIL (<150nm)
		Repeatability. Motion System 8-axis Ultra-low parcentricity error enables precise localization (<0.5µm repeatability	AIRIS Software Interface to 3rd-party software including CADNav Developed over 14 years with industry input
		Reliability. Uptime >97% worldwide Consistent data