IREM Systems for Semiconductor FA/Debug
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IREM-I Upgrades

Image 90nm device. 25x Lens 4x4 Mosaic / SIL Overlay Image / SIL detail 257nm line spacing
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IREM Systems

IREM-SIL  
IREM-II

IREM-SIL Subsystems  
Optics
Motion & Electronics
AIRIS Software

Upgrades  
IREM-I to SIL
IREM-II to SIL
IREM-I Upgrade Path
Upgrade paths are flexible and provide immediate benefits with cost-effective upgrades of key critical subsystems:
  • Step 1 can be a standalone upgrade or can be combined with Step 2.
  • If Step 1 is taken as a standalone upgrade, Step 2 and Option 3 can still be made later.

Step 1-I -  IREM-I to IREM-II Camera Upgrade with Lens Slide Upgrade
This can be a standalone upgrade or a prerequisite to Step 2 and Option 3.
  • Camera Upgrade - IREM-II Camera Cryo-system upgrade (optional, if required).
  • Lens Slide Upgrade - 2, 3 or 4-position feedback controlled
  • Objectives (Existing or New) - 0.3x, 1x, 25x, 100x or other magnification
  • Auxiliary Electronics Upgrade
  • AIRIS Software Upgrade (optional PC & Display)
  • Stage Modifications – if needed for lens slide  
Step 2 -  SIL Upgrade
For resolution upgrades required for SIL operations. Step 1 is required for Step 2.
  • Lens Sector - 2, 3 or 4-position IREM-SIL Lens (Hemisphere or Cone SIL)
  • Objectives (Existing or New) - 0.3x, 1x, 25x, 100x, SIL or other magnfication
  • Auxiliary Electronics
  • AIRIS Software Upgrade for SIL
  • Stage Upgrade (z-slide, encoder, y-slide)  
Option 3 - Full IREM-SIL Option
Option 3 is taken if the IC device profile requires viewing angle compensation due to angle restricted areas in the Regions of Interest. This option can follow Step 2 at any time in the budget cycle.
  • Tip-Tilt Table Control
  • Firmware/Software
  • Stage Frame Upgrades for Tip-Tilt Table